Slit valve seal
Slit valve seal
● We provide solutions to various demands by combining our long-standing experience as a comprehensive seal manufacturer, abundant materials, and unique optimal shape design for sealing materials used in vacuum equipment across a wide range of industries, including semiconductors and liquid crystals. ● For the semiconductor industry, we manufacture and sell products that excel in low dust generation, plasma resistance, chemical resistance, and low adhesion properties. For the liquid crystal industry, we produce products that accommodate larger substrates. ● As part of our product lineup for these industries, we offer chamber slit valve seals (gate valve seals) that can be used at the entrance (gate) for transporting wafers within processing chambers, such as in the film formation process of manufacturing equipment. 【Features】 ★ [Design and Shape] By optimizing the cross-sectional shape, our products have the following advantages compared to O-rings: - Excellent fit for grooves - Less prone to issues caused by twisting - Less likely to fall out of grooves ★ [Materials] We can manufacture using various materials to meet diverse requirements such as low dust generation, wear resistance, and plasma resistance.
- 企業：三菱電線工業
- 価格：Other
